Invention Grant
- Patent Title: Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses
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Application No.: US17563936Application Date: 2021-12-28
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Publication No.: US12237827B2Publication Date: 2025-02-25
- Inventor: Ventsislav Yantchev , Patrick Turner , Robert B. Hammond
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ARENTFOX SCHIFF LLP
- Main IPC: H03H9/56
- IPC: H03H9/56 ; H03H3/02 ; H03H3/04 ; H03H9/02 ; H03H9/17 ; H03H9/205 ; H03H9/54

Abstract:
Filters and methods of making filters are disclosed. A filter device includes a substrate, a piezoelectric plate, and an acoustic Bragg reflector between a surface of the substrate and a back surface of the piezoelectric plate. A first portion of the piezoelectric plate has a first thickness, and a second portion of the piezoelectric plate has a second thickness less than the first thickness. A conductor pattern on front surfaces of the first and second portions of the piezoelectric plate includes a first interdigital transducer (IDT) with interleaved fingers on the first portion, and a second IDT with interleaved fingers on the second portion.
Public/Granted literature
Information query
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