- 专利标题: Metallization lines on integrated circuit products
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申请号: US18362044申请日: 2023-07-31
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公开(公告)号: US12131994B2公开(公告)日: 2024-10-29
- 发明人: Ruilong Xie , Lars Liebmann , Daniel Chanemougame , Geng Han
- 申请人: GlobalFoundries U.S. Inc.
- 申请人地址: US NY Malta
- 专利权人: GLOBALFOUNDRIES U.S. INC.
- 当前专利权人: GLOBALFOUNDRIES U.S. INC.
- 当前专利权人地址: US NY Malta
- 代理机构: Hoffman Warnick LLC
- 代理商 Francois Pagette
- 分案原申请号: US15285092 2016.10.04
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H01L21/768 ; H01L23/522 ; H01L23/532 ; H01L21/02 ; H01L21/8234 ; H01L21/8238 ; H01L27/088 ; H01L27/092 ; H01L29/40
摘要:
An integrated circuit product includes a first layer of insulating material above a device layer of a semiconductor substrate and with a lowermost surface above an uppermost surface of a gate of a transistor in a device layer of the semiconductor substrate. A metallization blocking structure is in an opening in the first layer of insulating material and has a lowermost surface above the uppermost surface of the gate and includes a second insulating material that is different from the first insulating material. A metallization trench is in the first layer of insulating material on opposite sides of the metallization blocking structure. A contact structure is in the second insulating material and entirely below the metallization trench. A conductive metallization line includes first and second portions positioned in the metallization trench on opposite sides of the metallization blocking structure and a long axis extending along the first and second portions.
公开/授权文献
- US20230395502A1 METALLIZATION LINES ON INTEGRATED CIRCUIT PRODUCTS 公开/授权日:2023-12-07
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