- 专利标题: Storage unit and method of manufacturing the same and three-dimensional memory
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申请号: US17597926申请日: 2019-07-29
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公开(公告)号: US12120875B2公开(公告)日: 2024-10-15
- 发明人: Gang Zhang , Zongliang Huo
- 申请人: Institute of Microelectronics, Chinese Academy of Sciences
- 申请人地址: CN Beijing
- 专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人地址: CN Beijing
- 代理机构: Osha Bergman Watanabe & Burton LLP
- 国际申请: PCT/CN2019/098146 2019.07.29
- 国际公布: WO2021/016791A 2021.02.04
- 进入国家日期: 2022-01-28
- 主分类号: H10B43/27
- IPC分类号: H10B43/27
摘要:
A storage unit, a method of manufacturing the storage unit, and a three-dimensional memory. The storage unit includes: a first conductivity-type substrate; a channel layer stacked on the first conductivity-type substrate in a first direction; a second conductivity-type conduction layer including a first part and a second part that are connected, the first part being located between the first conductivity-type substrate and the channel layer, and the second part being formed in a via hole passing through the channel layer; a channel passage layer penetrating the channel layer and the first part in a negative direction of the first direction, and extending into an interior of the first conductivity-type substrate; and an insulating layer located in the channel layer and surrounding a periphery of the channel passage layer. The first conductivity-type substrate and the second conductivity-type conduction layer provide carriers required for reading and erasing operations, respectively.
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