Invention Grant
- Patent Title: Method for manufacturing semiconductor device
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Application No.: US17285401Application Date: 2019-10-17
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Publication No.: US12094979B2Publication Date: 2024-09-17
- Inventor: Shunpei Yamazaki , Yasuhiro Jinbo , Jun Ishikawa , Sachiaki Tezuka , Tetsuya Kakehata
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: NIXON PEABODY LLP
- Agent Jeffrey L. Costellia
- Priority: JP 18201928 2018.10.26 JP 18201930 2018.10.26
- International Application: PCT/IB2019/058842 2019.10.17
- International Announcement: WO2020/084406A 2020.04.30
- Date entered country: 2021-04-14
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L21/02 ; H01L21/768 ; H01L29/66 ; H01L29/786

Abstract:
A semiconductor device having favorable electrical characteristics is provided. The semiconductor device includes a first oxide; a first conductor and a second conductor over the first oxide; a first insulator over the first conductor; a second insulator over the second conductor; a third insulator over the first insulator and the second insulator; a second oxide positioned over the first oxide and between the first conductor and the second conductor; a fourth insulator over the second oxide; a third conductor over the fourth insulator; a fifth insulator in contact with a top surface of the third insulator, a top surface of the second oxide, a top surface of the fourth insulator, and a top surface of the third conductor; a fourth conductor embedded in an opening formed in the first insulator, the third insulator, and the fifth insulator and in contact with the first conductor; and a fifth conductor embedded in an opening formed in the second insulator, the third insulator, and the fifth insulator and in contact with the second conductor. The third insulator includes, in the vicinity of an interface with the fourth conductor and in the vicinity of an interface with the fifth conductor, a region having a higher nitrogen concentration than a different region of the third insulator.
Public/Granted literature
- US20210399134A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2021-12-23
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