发明授权
- 专利标题: Local contacts of three-dimensional memory devices and methods for forming the same
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申请号: US17321258申请日: 2021-05-14
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公开(公告)号: US12022656B2公开(公告)日: 2024-06-25
- 发明人: Jianzhong Wu , Kun Zhang , Tingting Zhao , Rui Su , Zhongwang Sun , Wenxi Zhou , Zhiliang Xia
- 申请人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 申请人地址: CN Wuhan
- 专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人地址: CN Wuhan
- 代理机构: BAYES PLLC
- 分案原申请号: US16862368 2020.04.29
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H01L21/768 ; H01L23/535 ; H10B41/27 ; H10B41/35 ; H10B43/35
摘要:
A method for forming a 3D memory device is disclosed. A channel structure extending vertically through a dielectric stack including interleaved sacrificial layers and dielectric layers above a substrate is formed. A sacrificial plug above and in contact with the channel structure is formed. A slit opening extending vertically through the dielectric stack is formed. A memory stack including interleaved conductive layers and the dielectric layers is formed by replacing, through the slit opening, the sacrificial layers with the conductive layers. A first contact portion is formed in the slit opening. The sacrificial plug is removed after forming the first contact portion to expose the channel structure. A channel local contact above and in contact with the channel structure, and a second contact portion above the first contact portion in the slit opening are simultaneously formed.
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