- 专利标题: Memory device having bit line with stepped profile
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申请号: US17729250申请日: 2022-04-26
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公开(公告)号: US12022649B2公开(公告)日: 2024-06-25
- 发明人: Tzu-Ching Tsai
- 申请人: NANYA TECHNOLOGY CORPORATION
- 申请人地址: TW New Taipei
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW New Taipei
- 代理商 Xuan Zhang
- 主分类号: H10B12/00
- IPC分类号: H10B12/00 ; H01L21/768 ; H01L23/532
摘要:
The present application provides a memory device having a bit line (BL) with a stepped profile. The memory device includes a semiconductor substrate including a first surface; and a bit line disposed on the first surface of the semiconductor substrate, wherein the bit line includes a first dielectric layer, a conductive layer disposed over the first dielectric layer, a second dielectric layer disposed over the conductive layer, and a spacer surrounding the first dielectric layer, the conductive layer and the second dielectric layer, wherein the second dielectric layer includes a first portion surrounded by the spacer, and a second portion disposed over the first portion and exposed through the spacer, wherein a first width of the first portion is substantially greater than a second width of the second portion.
公开/授权文献
- US20230345707A1 MEMORY DEVICE HAVING BIT LINE WITH STEPPED PROFILE 公开/授权日:2023-10-26
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