- 专利标题: Method and apparatus for determining a force applied to a sample during an optical interrogation technique
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申请号: US17812512申请日: 2022-07-14
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公开(公告)号: US12019014B2公开(公告)日: 2024-06-25
- 发明人: William Robert Keefe , Gang Feng , Min Yan , William Bayer , Peter Steinberg
- 申请人: Thermo Electron Scientific Instruments LLC
- 申请人地址: US WI Madison
- 专利权人: Thermo Electron Scientific Instruments LLC
- 当前专利权人: Thermo Electron Scientific Instruments LLC
- 当前专利权人地址: US WI Madison
- 代理机构: BakerHostetler
- 主分类号: G01N21/35
- IPC分类号: G01N21/35 ; G01L1/22 ; G01N21/3563
摘要:
An optical measurement system measurement system for examining a sample. The measurement system comprises an internally reflective element, a stage, an optical assembly, a chassis, and a sensor. The internally reflective element has a contact surface. The stage is positioned below the internally reflective element. The stage and the internally reflective element are configured to apply a force to the sample. The optical assembly comprises a light source and a light detector. The optical assembly is configured to scan the sample by directing source light from the light source towards the contact surface and detecting source light optically interacting with the contact surface by the light detector. The chassis is configured to support the optical assembly and the internally reflective element. The sensor is mounted to the chassis and configured to detect the force applied to the sample by the internally reflective element and the stage.
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