公开(公告)号：US12019014B2

公开(公告)日：2024-06-25

申请号：US17812512

申请日：2022-07-14

申请人： Thermo Electron Scientific Instruments LLC

发明人： William Robert Keefe ,  Gang Feng ,  Min Yan ,  William Bayer ,  Peter Steinberg

IPC分类号： G01N21/35 ,  G01L1/22 ,  G01N21/3563

CPC分类号： G01N21/3563 ,  G01L1/22 ,  G01N2201/0634

摘要： An optical measurement system measurement system for examining a sample. The measurement system comprises an internally reflective element, a stage, an optical assembly, a chassis, and a sensor. The internally reflective element has a contact surface. The stage is positioned below the internally reflective element. The stage and the internally reflective element are configured to apply a force to the sample. The optical assembly comprises a light source and a light detector. The optical assembly is configured to scan the sample by directing source light from the light source towards the contact surface and detecting source light optically interacting with the contact surface by the light detector. The chassis is configured to support the optical assembly and the internally reflective element. The sensor is mounted to the chassis and configured to detect the force applied to the sample by the internally reflective element and the stage.

公开(公告)号：US20230016495A1

公开(公告)日：2023-01-19

申请号：US17812512

申请日：2022-07-14

申请人： Thermo Electron Scientific Instruments LLC

发明人： William Robert Keefe ,  Gang Feng ,  Min Yan ,  William Bayer ,  Peter Steinberg

IPC分类号： G01N21/3563 ,  G01L1/22

摘要： An optical measurement system measurement system for examining a sample. The measurement system comprises an internally reflective element, a stage, an optical assembly, a chassis, and a sensor. The internally reflective element has a contact surface. The stage is positioned below the internally reflective element. The stage and the internally reflective element are configured to apply a force to the sample. The optical assembly comprises a light source and a light detector. The optical assembly is configured to scan the sample by directing source light from the light source towards the contact surface and detecting source light optically interacting with the contact surface by the light detector. The chassis is configured to support the optical assembly and the internally reflective element. The sensor is mounted to the chassis and configured to detect the force applied to the sample by the internally reflective element and the stage.