- 专利标题： Waveform shape factor for pulsed PVD power
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申请号： US17858592申请日： 2022-07-06
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公开(公告)号： US12018361B2公开(公告)日： 2024-06-25
- 发明人: Shouyin Zhang , Keith A. Miller
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Servilla Whitney LLC
- 主分类号： C23C14/54
- IPC分类号： C23C14/54 ; C23C14/28 ; H01J37/32 ; H05H1/00
摘要：
Power supplies, waveform function generators and methods for controlling a plasma process are described. The power supplies or waveform function generators include a component for executing the method in which a waveform shape change index is determined during a plasma process and evaluated for compliance with a predetermined tolerance.
公开/授权文献
- US20220356559A1 WAVEFORM SHAPE FACTOR FOR PULSED PVD POWER 公开/授权日：2022-11-10
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