Invention Grant
- Patent Title: Semiconductor crystal growth method and device
-
Application No.: US17606694Application Date: 2020-01-16
-
Publication No.: US12000060B2Publication Date: 2024-06-04
- Inventor: Weimin Shen , Gang Wang , Hanyi Huang , Yun Liu
- Applicant: ZING SEMICONDUCTOR CORPORATION
- Applicant Address: CN Shanghai
- Assignee: ZING SEMICONDUCTOR CORPORATION
- Current Assignee: ZING SEMICONDUCTOR CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: BakerHostetler
- Priority: CN 1910357352.5 2019.04.29
- International Application: PCT/CN2020/072501 2020.01.16
- International Announcement: WO2020/220766A 2020.11.05
- Date entered country: 2021-10-26
- Main IPC: C30B15/14
- IPC: C30B15/14 ; C30B15/10 ; C30B15/20 ; C30B29/06

Abstract:
A semiconductor crystal growth method and device are provided. The method comprises: obtaining an initial position of a graphite crucible when used in a semiconductor crystal growth process for the first time; obtaining a current production batch of the graphite crucible which characterizes a number of times of growth processes performed by the graphite crucible so far; and loading polysilicon raw materials into a quartz crucible sleeved in the graphite crucible based on the current production batch, wherein a total weight of the materials is called a charging amount, and the charging amount is adjusted based on the current production batch to keep an initial position of a silicon melt liquid surface in the quartz crucible stable while keeping the initial position of the graphite crucible unchanged. The present invention ensures the stability of each parameter in the crystal pulling process, and enhances the crystal pulling speed and quality.
Public/Granted literature
- US20220213614A1 SEMICONDUCTOR CRYSTAL GROWTH METHOD AND DEVICE Public/Granted day:2022-07-07
Information query
IPC分类: