Invention Grant
- Patent Title: Multifunction magnetic and piezoresistive MEMS pressure sensor
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Application No.: US18109180Application Date: 2023-02-13
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Publication No.: US11937511B2Publication Date: 2024-03-19
- Inventor: Majid Khan , Roberto M. Ribeiro , Savas Gider
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: BAKERHOSTETLER
- The original application number of the division: US17030275 2020.09.23
- Main IPC: H10N30/20
- IPC: H10N30/20 ; G01L1/16 ; G01L1/18 ; G01L9/00 ; G01L19/00 ; G01S3/781 ; H10N30/00 ; H10N30/88

Abstract:
Aspects of the subject disclosure include a pressure-sensing device consisting of a housing including a membrane and one or more piezoresistive elements disposed on the membrane to sense a displacement due to a deflection of the membrane. A first set of electrodes is disposed over the membrane, and a second set of electrodes is disposed on a permeable port of the device at a distance from the membrane. The first and second sets of electrodes form an electrostatic actuator to exert a repulsive force onto the membrane to reduce the deflection of the membrane.
Public/Granted literature
- US20230189654A1 MULTIFUNCTION MAGNETIC AND PIEZORESISTIVE MEMS PRESSURE SENSOR Public/Granted day:2023-06-15
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