- 专利标题: Packaging surface acoustic wave devices with conductive terminals
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申请号: US17364242申请日: 2021-06-30
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公开(公告)号: US11923817B2公开(公告)日: 2024-03-05
- 发明人: Li Ann Koo , Takashi Inoue , Vivian Sing Zhi Lee , Ping Yi Tan
- 申请人: Skyworks Solutions, Inc.
- 申请人地址: US CA Irvine
- 专利权人: Skyworks Solutions, Inc.
- 当前专利权人: Skyworks Solutions, Inc.
- 当前专利权人地址: US CA Irvine
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 主分类号: H03H3/08
- IPC分类号: H03H3/08 ; B23K26/362 ; H03H9/02 ; H03H9/05 ; H03H9/10 ; H03H9/25
摘要:
Methods of making packaged surface acoustic wave devices are provided. The method may include forming a photosensitive resin coat over a cavity-defining structure encapsulating a surface acoustic wave device. The photosensitive resin coat may be formed using a spin-coating process, and then patterned to form a desired shape. Portions of the photosensitive resin may be removed from areas near the edge of the die, to facilitate separation of a wafer into individual dies. The method may also include forming a conductive structure using a plating process, where the conductive structure is located between the resin coat and the cavity defining structure. The photosensitive resin can include a phenol resin. The packaged surface acoustic wave devices made using a photosensitive resin coat may be relatively thin, and may have a height of less than 220 micrometers.
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