Invention Grant
- Patent Title: Monolithic modular microwave source with integrated process gas distribution
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Application No.: US16586482Application Date: 2019-09-27
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Publication No.: US11881384B2Publication Date: 2024-01-23
- Inventor: James Carducci , Richard C. Fovell , Larry D. Elizaga , Silverst Rodrigues , Vladimir Knyazik , Philip Allan Kraus , Thai Cheng Chua
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/511 ; C23C16/455

Abstract:
Embodiments disclosed herein include a housing for a source array. In an embodiment, the housing comprises a conductive body, where the conductive body comprises a first surface and a second surface opposite from the first surface. In an embodiment a plurality of openings are formed through the conductive body and a channel is disposed into the second surface of the conductive body. In an embodiment, a cover is over the channel, and the cover comprises first holes that pass through a thickness of the cover. In an embodiment, the housing further comprises a second hole through a thickness of the conductive body. In an embodiment, the second hole intersects with the channel.
Public/Granted literature
- US20210098231A1 MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DISTRIBUTION Public/Granted day:2021-04-01
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