- 专利标题: Acoustic wave device with multi-layer substrate including ceramic
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申请号: US16800248申请日: 2020-02-25
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公开(公告)号: US11876501B2公开(公告)日: 2024-01-16
- 发明人: Hironori Fukuhara , Rei Goto , Keiichi Maki
- 申请人: Skyworks Solutions, Inc.
- 申请人地址: US CA Irvine
- 专利权人: Skyworks Solutions, Inc.
- 当前专利权人: Skyworks Solutions, Inc.
- 当前专利权人地址: US CA Irvine
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/25 ; H03H9/145 ; H03H9/72 ; H03H9/64 ; H03H9/05 ; H03H3/10 ; H10N30/072
摘要:
An acoustic wave device is disclosed. The acoustic wave device includes a support layer, a ceramic layer positioned over the support layer, a piezoelectric layer positioned over the ceramic layer, and an interdigital transducer electrode positioned over the piezoelectric layer. The support layer has a higher thermal conductivity than the ceramic layer. The ceramic layer can be a polycrystalline spinel layer. The acoustic wave device can be a surface acoustic wave device configured to generate a surface acoustic wave.
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