- 专利标题： Integration of semiconductor membranes with piezoelectric substrates
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申请号： US16881305申请日： 2020-05-22
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公开(公告)号： US11864465B2公开(公告)日： 2024-01-02
- 发明人: Max G. Lagally , Abhishek Bhat , Frank Steele Flack , Shelley Ann Scott , Robert H. Blick
- 申请人： Wisconsin Alumni Research Foundation , University of Hamburg
- 申请人地址： US WI Madison
- 专利权人： Wisconsin Alumni Research Foundation
- 当前专利权人： Wisconsin Alumni Research Foundation
- 当前专利权人地址： US WI Madison
- 代理机构： Bell & Manning, LLC
- 主分类号： H01L41/312
- IPC分类号： H01L41/312 ; H10N30/072 ; H10N30/20 ; H10N30/80 ; H10N30/87 ; H10N30/853
摘要：
Piezoelectrically actuated devices constructed from thin semiconductor membranes bonded directly to piezoelectric substrates are provided. Methods for fabricating these devices are also provided. The bonding of the semiconductor to the piezoelectric material does not require the use of any intermediate layers, such as bonding agents.
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