- 专利标题: Wave guide filter for semiconductor imaging devices
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申请号: US17579030申请日: 2022-01-19
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公开(公告)号: US11862650B2公开(公告)日: 2024-01-02
- 发明人: Cheng Yu Huang , Chun-Hao Chuang , Chien-Hsien Tseng , Kazuaki Hashimoto , Keng-Yu Chou , Wei-Chieh Chiang , Wen-Chien Yu , Ting-Cheng Chang , Wen-Hau Wu , Chih-Kung Chang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 分案原申请号: US16416583 2019.05.20
- 主分类号: H01L27/14
- IPC分类号: H01L27/14 ; H01L27/146
摘要:
In some embodiments, an image sensor is provided. The image sensor includes a photodetector disposed in a semiconductor substrate. A wave guide filter having a substantially planar upper surface is disposed over the photodetector. The wave guide filter includes a light filter disposed in a light filter grid structure. The light filter includes a first material that is translucent and has a first refractive index. The light filter grid structure includes a second material that is translucent and has a second refractive index less than the first refractive index.
公开/授权文献
- US20220139983A1 WAVE GUIDE FILTER FOR SEMICONDUCTOR IMAGING DEVICES 公开/授权日:2022-05-05
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