- 专利标题: Apparatus and method of testing an object within a dry gas environment
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申请号: US17370090申请日: 2021-07-08
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公开(公告)号: US11860083B2公开(公告)日: 2024-01-02
- 发明人: Dahm Yu , Jaehyun Kim , Seonmi Lee , Hyunmin Kwon , Sangjun Lee
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO, LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO, LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: F. CHAU & ASSOCIATES, LLC
- 优先权: KR 20200169442 2020.12.07
- 主分类号: G01N19/10
- IPC分类号: G01N19/10 ; G01R31/28
摘要:
An apparatus for testing an object may include a test chamber, a first chamber, a second chamber, and a gas supply module. The test chamber receives a test board for testing an object. The first chamber is under the test chamber and receives a lower surface of the test board. The second chamber surrounds the first chamber to isolate the first chamber from ambient air. The gas supply module supplies a dry gas to the second chamber to provide a positive pressure higher than an ambient pressure, thereby preventing the ambient air from infiltrating into the first chamber. Thus, during the testing of the object at a low temperature, the second chamber may prevent the humid ambient air from infiltrating into the first chamber to prevent condensation of water on the lower surface of the test board.
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