Invention Grant
- Patent Title: Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device
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Application No.: US17990163Application Date: 2022-11-18
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Publication No.: US11815807B2Publication Date: 2023-11-14
- Inventor: Yohei Ikebe , Tsutomu Shoki
- Applicant: HOYA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HOYA CORPORATION
- Current Assignee: HOYA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: JP 18100363 2018.05.25 JP 18165248 2018.09.04
- Main IPC: G03F1/32
- IPC: G03F1/32 ; G03F1/24

Abstract:
Provided is a reflective mask blank with which it is possible to further reduce the shadowing effect of a reflective mask, and also possible to form a fine and highly accurate phase-shift pattern. A reflective mask blank having, in the following order on a substrate, a multilayer reflective film and a phase-shift film that shifts the phase of EUV light, said reflective mask blank characterized in that: the phase-shift film has a first layer and a second layer; the first layer comprises a material that contains at least one element from among tantalum (Ta) and chromium (Cr); and the second layer comprises a metal-containing material that contains ruthenium (Ru) and at least one element from among chromium (Cr), nickel (Ni), cobalt (Co), vanadium (V), niobium (Nb), molybdenum (Mo), tungsten (W), and rhenium (Re).
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