Invention Grant
- Patent Title: Structure and formation method of package with underfill
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Application No.: US17459215Application Date: 2021-08-27
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Publication No.: US11784130B2Publication Date: 2023-10-10
- Inventor: Yu-Sheng Lin , Shin-Puu Jeng , Po-Yao Lin , Chin-Hua Wang , Shu-Shen Yeh , Che-Chia Yang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L21/48 ; H01L21/683 ; H01L23/13

Abstract:
A package structure and a formation method of a package structure are provided. The method includes forming a recess in a circuit substrate, and the recess has a first sidewall and a second sidewall. The second sidewall is between the first sidewall and a bottommost surface of the circuit substrate, and the second sidewall is steeper than the first sidewall. The method also includes forming a die package, and the die package has a semiconductor die. The method further includes bonding the die package to the circuit substrate through bonding structures such that a portion of the semiconductor die enters the recess of the circuit substrate. In addition, the method includes forming an underfill material to surround the bonding structures and to fill the recess.
Public/Granted literature
- US20230064957A1 STRUCTURE AND FORMATION METHOD OF PACKAGE WITH UNDERFILL Public/Granted day:2023-03-02
Information query
IPC分类: