- 专利标题: Floating gate test structure for embedded memory device
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申请号: US17375077申请日: 2021-07-14
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公开(公告)号: US11737267B2公开(公告)日: 2023-08-22
- 发明人: Hung-Ling Shih , Yong-Shiuan Tsair
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/11531
- IPC分类号: H01L27/11531 ; H01L27/11521 ; H01L29/423 ; H01L23/528 ; H01L23/522 ; H01L29/08 ; H01L29/66 ; H01L21/3213 ; H01L21/28 ; H01L21/311 ; G11C29/14 ; H01L29/788 ; H10B41/42 ; H10B41/30
摘要:
Various embodiments of the present application are directed to an integrated circuit (IC) comprising a floating gate test device, as well as a method for forming the IC. In some embodiments, the IC comprises a memory cell structure including a pair of control gates respectively separated from a substrate by a pair of floating gates and a pair of select gate electrodes disposed on opposite sides of the pair of control gates. A memory test structure includes a pair of dummy control gates respectively separated from the substrate by a pair of dummy floating gates and a pair of dummy select gate electrodes disposed on opposite sides of the pair of dummy control gates. The memory test structure further includes a pair of conductive floating gate test contact vias respectively extending through the pair of dummy control gates and reaching on the dummy floating gates.
公开/授权文献
- US20210343735A1 FLOATING GATE TEST STRUCTURE FOR EMBEDDED MEMORY DEVICE 公开/授权日:2021-11-04
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