- 专利标题: EMI shielding for flip chip package with exposed die backside
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申请号: US17660093申请日: 2022-04-21
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公开(公告)号: US11715703B2公开(公告)日: 2023-08-01
- 发明人: SungWon Cho , ChangOh Kim , Il Kwon Shim , InSang Yoon , KyoungHee Park
- 申请人: STATS ChipPAC Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Atkins and Associates, P.C.
- 代理商 Brian M. Kaufman; Robert D. Atkins
- 主分类号: H01L23/552
- IPC分类号: H01L23/552 ; H01L23/31 ; H01L23/367 ; H01L23/498 ; H01L23/50 ; H01L23/522 ; H01L23/00 ; H01L23/36 ; H01L23/60 ; H01L27/02
摘要:
A semiconductor device has a substrate and a semiconductor die disposed over the substrate. An encapsulant is deposited over the semiconductor die and substrate with a surface of the semiconductor die exposed from the encapsulant. A first shielding layer is formed over the semiconductor die. In some embodiments, the first shielding layer includes a stainless steel layer in contact with the surface of the semiconductor die and a copper layer formed over the stainless steel layer. The first shielding layer may further include a protective layer formed over the copper layer. One embodiment has a heatsink bonded to the semiconductor die through a solder layer. A second shielding layer can be formed over a side surface of the semiconductor die.
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