- 专利标题: Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device
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申请号: US17238468申请日: 2021-04-23
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公开(公告)号: US11664428B2公开(公告)日: 2023-05-30
- 发明人: Satoru Nagao , Yusuke Tsukada , Kazunori Kamada , Shuichi Kubo , Hirotaka Ikeda , Kenji Fujito , Hideo Fujisawa , Yutaka Mikawa , Tae Mochizuki
- 申请人: Mitsubishi Chemical Corporation
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Chemical Corporation
- 当前专利权人: Mitsubishi Chemical Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP 13165293 2013.08.08 JP 14006907 2014.01.17 JP 14038722 2014.02.28 JP 14090535 2014.04.24 JP 14104383 2014.05.20 JP 14122520 2014.06.13
- 分案原申请号: US16574224 2019.09.18
- 主分类号: C30B25/20
- IPC分类号: C30B25/20 ; H01L29/20 ; C30B29/40 ; C30B25/18 ; C30B7/10 ; H01L21/02 ; C30B23/02
摘要:
An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10−5 Å or less is observed.
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