发明授权
- 专利标题: Three-dimensional memory devices with supporting structure for staircase region
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申请号: US17085305申请日: 2020-10-30
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公开(公告)号: US11647632B2公开(公告)日: 2023-05-09
- 发明人: Kun Zhang , Linchun Wu , Zhong Zhang , Wenxi Zhou , Zongliang Huo
- 申请人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 申请人地址: CN Wuhan
- 专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人地址: CN Wuhan
- 代理机构: Bayes PLLC
- 主分类号: H01L27/1158
- IPC分类号: H01L27/1158 ; H01L25/18 ; H01L21/768 ; H01L23/00 ; H01L25/00 ; H01L27/11582
摘要:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack, a first semiconductor layer, a supporting structure, a second semiconductor layer, and a plurality of channel structures. The memory stack includes vertically interleaved conductive layers and dielectric layers and has a core array region and a staircase region in a plan view. The first semiconductor layer is above and overlaps the core array region of the memory stack. The supporting structure is above and overlaps the staircase region of the memory stack. The supporting structure and the first semiconductor layer are coplanar. The second semiconductor layer is above and in contact with the first semiconductor layer and the supporting structure. Each channel structure extends vertically through the core array region of the memory stack and the first semiconductor layer into the second semiconductor layer.
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