- 专利标题: Resist underlying film forming composition
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申请号: US16646987申请日: 2018-09-19
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公开(公告)号: US11635692B2公开(公告)日: 2023-04-25
- 发明人: Mamoru Tamura , Hiroto Ogata , Takahiro Kishioka
- 申请人: NISSAN CHEMICAL CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JPJP2017-182403 20170922
- 国际申请: PCT/JP2018/034584 WO 20180919
- 国际公布: WO2019/059210 WO 20190328
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; C09D163/04 ; C08G59/14 ; G03F7/16 ; G03F7/20 ; G03F7/38 ; G03F7/32 ; H01L21/027 ; H01L21/311
摘要:
A resist underlayer film forming composition contains a resin containing a unit structure represented by formula (1): [in formula (1), R1 represents a thiadiazole group which is optionally substituted with a C1-6 alkyl group optionally interrupted by a carboxy group, a C1-6 alkyl group optionally substituted with a hydroxyl group, or a C1-4 alkylthio group, and R2 represents a hydrogen atom or formula (2): (in formula (2), R1 is the same as defined above, and * represents a binding moiety)]. The resist underlayer film forming composition provides a resist underlayer film which has excellent solvent resistance, excellent optical parameters, an excellent dry etching rate, and excellent embeddability.
公开/授权文献
- US20200209753A1 RESIST UNDERLYING FILM FORMING COMPOSITION 公开/授权日:2020-07-02
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