- 专利标题: Seal for a flow restrictor
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申请号: US16985635申请日: 2020-08-05
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公开(公告)号: US11585444B2公开(公告)日: 2023-02-21
- 发明人: Matthew Eric Kovacic , Zachariah Ezekiel McIntyre , Sean Joseph Penley , Christopher Bryant Davis
- 申请人: Ichor Systems, Inc.
- 申请人地址: US CA Fremont
- 专利权人: Ichor Systems, Inc.
- 当前专利权人: Ichor Systems, Inc.
- 当前专利权人地址: US CA Fremont
- 代理机构: The Belles Group, P.C.
- 主分类号: F16K1/52
- IPC分类号: F16K1/52 ; F15D1/02 ; H01L21/67
摘要:
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on effectively sealed flow restrictors which can eliminate leakage of process gas around the flow restrictors. In one embodiment, a seal for a flow restrictor is disclosed, the seal comprising a plastic cylinder which is shrink fit onto a sealing portion of the flow restrictor. In another embodiment, a seal for a flow restrictor is disclosed, the seal having a first sealing ring with a flow aperture, a flow restrictor installed into the flow aperture.
公开/授权文献
- US20210041027A1 SEAL FOR A FLOW RESTRICTOR 公开/授权日:2021-02-11
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