- 专利标题: ESD structure and semiconductor structure
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申请号: US16996986申请日: 2020-08-19
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公开(公告)号: US11532607B2公开(公告)日: 2022-12-20
- 发明人: Chun-Chia Hsu , Tung-Heng Hsieh , Yung-Feng Chang , Bao-Ru Young , Jam-Wem Lee , Chih-Hung Wang
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: McClure, Qualey & Rodack, LLP
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L29/06 ; H01L29/861
摘要:
Electrostatic discharge (ESD) structures are provided. An ESD structure includes a semiconductor substrate, a first epitaxy region with a first type of conductivity over the semiconductor substrate, a second epitaxy region with a second type of conductivity over the semiconductor substrate, and a plurality of first semiconductor layers and a plurality of second semiconductor layers. The first semiconductor layers and the second semiconductor layers are alternatingly stacked over the semiconductor substrate and between the first and second epitaxy regions. Each of the first and second semiconductor layers has a first side contacting the first epitaxy region and a second side contacting the second epitaxy region, and the first side is opposite the second side.
公开/授权文献
- US20220059524A1 ESD STRUCTURE AND SEMICONDUCTOR STRUCTURE 公开/授权日:2022-02-24
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