- 专利标题: Laser crystallizing apparatus
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申请号: US17235178申请日: 2021-04-20
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公开(公告)号: US11532476B2公开(公告)日: 2022-12-20
- 发明人: Akifumi Sangu , Gyoowan Han , Jekil Ryu , Kyungjae Lee
- 申请人: SAMSUNG DISPLAY CO., LTD.
- 申请人地址: KR Yongin-si
- 专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人地址: KR Yongin-si
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR10-2017-0166165 20171205
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; G02B27/28 ; G01J1/42 ; G02B27/10 ; B23K26/064 ; H01L27/12 ; B23K26/067 ; H01L21/67 ; B23K26/03 ; B23K26/08 ; B23K26/70 ; B23K26/352 ; B23K26/06 ; B23K26/354 ; B23K26/00 ; B23K101/40 ; B23K103/00
摘要:
A laser crystallizing apparatus includes a first light source unit configured to emit a first input light having a linearly polarized laser beam shape. A second light source unit is configured to emit a second input light having a linearly polarized laser beam shape. A polarization optical system is configured to rotate the first input light and/or the second input light at a predetermined rotation angle. An optical system is configured to convert the first input light and the second input light, which pass through the polarization optical system, into an output light. A target substrate is seated on a stage and output light is directed onto the target substrate. A monitoring unit is configured to receive the first input light or the second input light from the polarization optical system and measure a laser beam quality thereof.
公开/授权文献
- US20210257215A1 LASER CRYSTALLIZING APPARATUS 公开/授权日:2021-08-19
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