• 专利标题: Method for providing a probe device for scanning probe microscopy
  • 申请号: US16765382
    申请日: 2018-11-13
  • 公开(公告)号: US11480588B2
    公开(公告)日: 2022-10-25
  • 发明人: Bernd Irmer
  • 申请人: Nanotools GMBH
  • 申请人地址: DE Munich
  • 专利权人: Nanotools GMBH
  • 当前专利权人: Nanotools GMBH
  • 当前专利权人地址: DE Munich
  • 代理机构: Steve LeBlanc, LLC
  • 优先权: DE102017127645.9 20171123
  • 国际申请: PCT/EP2018/081016 WO 20181113
  • 国际公布: WO2019/101570 WO 20190531
  • 主分类号: G01Q30/04
  • IPC分类号: G01Q30/04 G01Q70/10 G01Q70/14 G01Q70/16
Method for providing a probe device for scanning probe microscopy
摘要:
The invention relates to a method for providing a probe device for scanning probe microscopy, in particular for atomic force microscopy, wherein a scanning probe microscope is used for measuring a sample by means of a tip which is arranged on a cantilever of the probe device and which has a tip geometry. According to the invention, in a step upstream of the manufacturing process producing the tip, the tip geometry is optimized based on a selected tip basic form with regard to defined, required measurement properties, by computer simulating and evaluating the tip geometry, and modifying the tip geometry according to the evaluation with regard to these measurement properties. The invention further relates to a probe device for scanning probe microscopy, in particular for atomic force microscopy, having a cantilever and a tip formed on the cantilever in the nanometer range, with which samples to be measured can be scanned.
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