发明授权
- 专利标题: Three-dimensional semiconductor memory device with concave convex separation structures
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申请号: US16857507申请日: 2020-04-24
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公开(公告)号: US11462554B2公开(公告)日: 2022-10-04
- 发明人: Yong-Hoon Son , Jae Hoon Kim , Kwang-ho Park , Hyunji Song , Gyeonghee Lee , Seungjae Jung
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2019-0113457 20190916
- 主分类号: H01L27/11565
- IPC分类号: H01L27/11565 ; H01L27/11573 ; H01L27/1157 ; H01L23/528 ; H01L23/522 ; H01L27/11582
摘要:
A semiconductor memory device is disclosed. The device includes a peripheral circuit structure on a substrate, a semiconductor layer on the peripheral circuit structure, an electrode structure on the semiconductor layer, the electrode structure including electrodes stacked on the semiconductor layer, a vertical channel structure penetrating the electrode structure and being connected to the semiconductor layer, a separation structure penetrating the electrode structure, extending in a first direction, and horizontally dividing the electrode of the electrode structure into a pair of electrodes, an interlayered insulating layer covering the electrode structure, and a through contact penetrating the interlayered insulating layer and being electrically connected to the peripheral circuit structure.
公开/授权文献
- US20210082941A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2021-03-18
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