Invention Grant
- Patent Title: Robot for simultaneous substrate transfer
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Application No.: US16922727Application Date: 2020-07-07
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Publication No.: US11443973B2Publication Date: 2022-09-13
- Inventor: Jason M. Schaller , Luke Bonecutter , Charles T. Carlson , Rajkumar Thanu , Karuppasamy Muthukamatchi , Jeff Hudgens , Benjamin Riordon
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/687 ; B65G47/90 ; H01L21/67

Abstract:
Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft counter-rotatable with the first shaft. The transfer apparatus may include an eccentric hub extending at least partially through the central hub, and which is radially offset from a central axis of the central hub. The transfer apparatus may also include an end effector coupled with the eccentric hub. The end effector may include a plurality of arms having a number of arms equal to the number of substrate supports of the plurality of substrate supports.
Public/Granted literature
- US20210013084A1 ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER Public/Granted day:2021-01-14
Information query
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