- 专利标题: Three-dimensional semiconductor memory device
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申请号: US17011517申请日: 2020-09-03
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公开(公告)号: US11417679B2公开(公告)日: 2022-08-16
- 发明人: Shinya Arai
- 申请人: Kioxia Corporation
- 申请人地址: JP Minato-ku
- 专利权人: Kioxia Corporation
- 当前专利权人: Kioxia Corporation
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11578 ; H01L29/792 ; H01L27/11565 ; H01L23/528 ; H01L23/532 ; H01L29/06 ; H01L29/08 ; H01L29/45
摘要:
According to one embodiment, a semiconductor memory device includes a substrate; an insulating layer provided on the substrate; a conductive layer provided on the insulating layer; a stacked body provided on the conductive layer and including a plurality of electrode layers and a plurality of insulating layers respectively provided among the plurality of electrode layers; a columnar section piercing through the stacked body to reach the conductive layer and extending in a first direction in which the stacked body is stacked; and a source layer. The columnar section includes a channel body and a charge storage film provided between the channel body and the respective electrode layers. The conductive layer includes a first film having electric conductivity and in contact with the lower end portion of the channel body; and an air gap provided to be covered by the first film.
公开/授权文献
- US1365206A Hot-air motor 公开/授权日:1921-01-11
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