- 专利标题: Post-passivation interconnect structure
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申请号: US16725121申请日: 2019-12-23
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公开(公告)号: US11417610B2公开(公告)日: 2022-08-16
- 发明人: Hsien-Wei Chen , Hao-Yi Tsai , Mirng-Ji Lii , Chen-Hua Yu
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/31 ; H01L23/522 ; H01L23/525
摘要:
A semiconductor device includes a semiconductor substrate, a passivation layer overlying the semiconductor substrate, and an interconnect structure overlying the passivation layer. The interconnect structure includes a landing pad region and a dummy region electrically separated from each other. A protective layer is formed on the interconnect structure and has a first opening exposing a portion of the landing pad region and a second opening exposing a portion of the dummy region. A metal layer is formed on the exposed portion of landing pad region and the exposed portion of the dummy region. A bump is formed on the metal layer overlying the landing pad region.
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