发明授权
- 专利标题: Peeling apparatus
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申请号: US17649125申请日: 2022-01-27
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公开(公告)号: US11417547B1公开(公告)日: 2022-08-16
- 发明人: Gentaro Tsuruta
- 申请人: DISCO CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: DISCO CORPORATION
- 当前专利权人: DISCO CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Greer Burns & Crain Ltd.
- 优先权: JPJP2021-022492 20210216
- 主分类号: B32B43/00
- IPC分类号: B32B43/00 ; H01L21/67 ; H01L21/683
摘要:
A peeling apparatus includes a discarding unit configured to discard a protective member by stacking the protective member in a trash box. The discarding unit includes an inclined dropping unit configured to drop the protective member obliquely downward to an opening of the trash box, and a first inclined plate and a second inclined plate that arranged so as to face each other in a direction orthogonal to a traveling direction of the protective member when the protective member dropping obliquely downward above the opening is viewed from above. The first inclined plate and the second inclined plate are arranged such that a gap through which the protective member can pass is formed between a lower side of the first inclined plate and a lower side of the second inclined plate, and the first inclined plate and the second inclined plate are inclined.
公开/授权文献
- US20220262659A1 PEELING APPARATUS 公开/授权日:2022-08-18
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