- 专利标题: System and method for cleaning contact elements and support hardware using functionalized surface microfeatures
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申请号: US16684453申请日: 2019-11-14
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公开(公告)号: US11211242B2公开(公告)日: 2021-12-28
- 发明人: Alan E. Humphrey , Jerry J. Broz , Bret A. Humphrey , Alex S. Poles
- 申请人: INTERNATIONAL TEST SOLUTIONS INC.
- 申请人地址: US NV Reno
- 专利权人: INTERNATIONAL TEST SOLUTIONS INC.
- 当前专利权人: INTERNATIONAL TEST SOLUTIONS INC.
- 当前专利权人地址: US NV Reno
- 代理机构: DLA Piper LLP US
- 主分类号: B24D3/00
- IPC分类号: B24D3/00 ; H01L21/02 ; H01L21/67
摘要:
A cleaning material, device, and method for predictably cleaning the contact elements and support hardware of a tester interface, such as a probe card and a test socket, in which the cleaning pad has a predetermined configuration appropriate for the particular pin contact elements and a substrate having a defined functionalized surface topology and geometry which can be introduced into the testing apparatus during the normal testing operations. The cleaning material has a predetermined topography with a plurality of functional 3-dimensional (3D) microstructures that provide performance characteristics which are not possible with a non-functionalized and flat surface.
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