Invention Grant
- Patent Title: Semiconductor device structure with magnetic layer and method for forming the same
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Application No.: US16222107Application Date: 2018-12-17
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Publication No.: US11171085B2Publication Date: 2021-11-09
- Inventor: Hon-Lin Huang , Wei-Li Huang , Chun-Kai Tzeng , Cheng-Jen Lin , Chin-Yu Ku
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/528 ; H01L49/02 ; H01L23/532

Abstract:
A semiconductor device structure is provided. The semiconductor device structure includes a substrate, and the substrate includes a first region and a second region. The semiconductor device structure includes a first conductive structure formed over the first region of the substrate and a bottom magnetic layer formed over the second region of the substrate. The semiconductor device structure also includes a second conductive structure formed over the bottom magnetic layer and a first insulating layer formed over a sidewall surface of the first conductive structure. The semiconductor device structure further includes a second insulating layer formed over the first insulating layer, and the second insulating layer has a stair-shaped structure.
Public/Granted literature
- US20190355660A1 SEMICONDUCTOR DEVICE STRUCTURE WITH MAGNETIC LAYER AND METHOD FOR FORMING THE SAME Public/Granted day:2019-11-21
Information query
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