Invention Grant
- Patent Title: Package structure having sensor die with touch sensing electrode, and method of fabricating the same
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Application No.: US15939293Application Date: 2018-03-29
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Publication No.: US11158555B2Publication Date: 2021-10-26
- Inventor: Ting-Ting Kuo , Chih-Hua Chen , Hao-Yi Tsai , Yu-Chih Huang , Chia-Hung Liu , Chih-Hsuan Tai , Ying-Cheng Tseng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L23/31
- IPC: H01L23/31 ; H01L23/498 ; H01L25/065 ; H01L21/56 ; H01L23/538 ; H01L23/00

Abstract:
A package structure including a semiconductor die, an insulating encapsulant, and a redistribution layer is provided. The semiconductor die includes a semiconductor substrate, a plurality of metallization layers disposed on the semiconductor substrate, and a passivation layer disposed on the plurality of metallization layers. The passivation layer has a first opening that partially expose a topmost layer of the plurality of metallization layers. The insulating encapsulant is encapsulating the semiconductor die. The redistribution layer includes at least a first dielectric layer and a first conductive layer stacked on the first dielectric layer. The first dielectric layer has a second opening that overlaps with the first opening, and a width ratio of the second opening to the first opening is in a range of 2.3:1 to 12:1. The first conductive layer is electrically connected to the topmost layer of the plurality of metallization layers through the first and second openings.
Public/Granted literature
- US20190304864A1 PACKAGE STRUCTURE AND METHOD OF FABRICATING THE SAME Public/Granted day:2019-10-03
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