- 专利标题: Semiconductor device and method for manufacturing the same
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申请号: US16211830申请日: 2018-12-06
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公开(公告)号: US11121062B2公开(公告)日: 2021-09-14
- 发明人: Hsih-Yang Chiu
- 申请人: NANYA TECHNOLOGY CORPORATION
- 申请人地址: TW New Taipei
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW New Taipei
- 代理机构: Muncy, Geissler, Olds and Lowe, P.C.
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/528 ; H01L21/768 ; H01L23/532
摘要:
The present disclosure relates to a semiconductor device and method of manufacturing the same. The semiconductor device includes a substrate and a through silicon via structure. The through silicon via is disposed in the substrate and includes an insulation layer and a plurality of conductive lines. The conductive lines are separated from each other by the insulation layer and extend from a top surface of the insulation layer to a bottom surface opposite to the top surface.
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