- 专利标题: Robot for simultaneous substrate transfer
-
申请号: US16922805申请日: 2020-07-07
-
公开(公告)号: US11117265B2公开(公告)日: 2021-09-14
- 发明人: Paul Z. Wirth , Charles T. Carlson , Jason M. Schaller
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Kilpatrick Townsend & Stockton LLP
- 主分类号: H01L21/687
- IPC分类号: H01L21/687 ; B25J11/00 ; B25J9/12 ; B25J9/00 ; B25J9/04 ; H01L21/677 ; B25J15/00
摘要:
Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a transfer apparatus having a central hub including a shaft extending at a distal end through the transfer region housing into the transfer region. The transfer apparatus may include a lateral translation apparatus coupled with an exterior surface of the transfer region housing, and configured to provide at least one direction of lateral movement of the shaft. The systems may also include an end effector coupled with the shaft within the transfer region. The end effector may include a plurality of arms having a number of arms equal to a number of substrate supports of the plurality of substrate supports in the transfer region.
公开/授权文献
- US20210008727A1 ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER 公开/授权日:2021-01-14
信息查询
IPC分类: