发明授权
- 专利标题: Resist composition, method of forming resist pattern, polymeric compound, and copolymer
-
申请号: US16334302申请日: 2017-10-04
-
公开(公告)号: US11099479B2公开(公告)日: 2021-08-24
- 发明人: Takashi Nagamine , Hideto Nito , Masafumi Fujisaki , Tatsuya Fujii , Yuki Fukumura , Takahiro Kojima , Issei Suzuki , Takuya Ikeda , KhanhTin Nguyen
- 申请人: TOKYO OHKA KOGYO CO., LTD.
- 申请人地址: JP Kawasaki
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: JPJP2016-197492 20161005,JPJP2017-176005 20170913
- 国际申请: PCT/JP2017/036151 WO 20171004
- 国际公布: WO2018/066606 WO 20180412
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/039 ; C08F20/26 ; G03F7/20 ; G03F7/038
摘要:
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a polymeric compound having a structural unit represented by general formula (a0-1) (wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; Va0 represents a divalent hydrocarbon group; na0 represents an integer of 0 to 2; Ra00 represents an acid dissociable group represented by general formula (a0-r1-1); Ra01 and Ra02 represents a hydrocarbon group; Ra01 and Ra02 may be mutually bonded to form a ring; Ya0 represents a quaternary carbon atom; Ra031, Ra032 and Ra033 each independently represents a hydrocarbon group, provided that at least one of Ra031, Ra032 and Ra033 is a hydrocarbon group having a polar group).
公开/授权文献
信息查询
IPC分类: