- 专利标题: System for and method of manufacturing an integrated circuit
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申请号: US16793693申请日: 2020-02-18
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公开(公告)号: US10977421B2公开(公告)日: 2021-04-13
- 发明人: Wei-Cheng Lin , Chih-Liang Chen , Chih-Ming Lai , Charles Chew-Yuen Young , Jiann-Tyng Tzeng , Kam-Tou Sio , Ru-Gun Liu , Shih-Wei Peng , Wei-Chen Chien
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Hauptman Ham, LLP
- 主分类号: G06F30/30
- IPC分类号: G06F30/30 ; G06F30/398 ; G06F30/392
摘要:
A method of manufacturing an integrated circuit includes generating a first layout design based on design criteria, performing a color mapping between the first layout design and a standard cell layout design thereby generating a via color layout design, and manufacturing the integrated circuit based on the via color layout design. The first layout design has a first set of vias divided into sub-sets of vias based on a corresponding color indicating that vias of the sub-set of vias with a same color, and vias of the sub-set of vias with a different color. The standard cell layout design has a second set of vias arranged in standard cells. The via color layout design has a third set of vias including a portion of the second set of vias and corresponding locations, and color of the corresponding sub-set of vias.
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