Invention Grant
- Patent Title: Meta-optical device and method of manufacturing the same
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Application No.: US15805864Application Date: 2017-11-07
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Publication No.: US10976472B2Publication Date: 2021-04-13
- Inventor: Jeongyub Lee , Changseung Lee , Yongsung Kim , Jaekwan Kim , Byonggwon Song , Sanghoon Song , Kiyeon Yang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2017-0015694 20170203
- Main IPC: G02B1/02
- IPC: G02B1/02 ; G02B1/00 ; C23C14/58 ; C23C14/06 ; C23C14/34 ; C23C16/40 ; G02B3/00 ; C23C16/50
Abstract:
A meta-optical device and a method of manufacturing the same are provided. The method includes depositing a group III-V compound semiconductor on a substrate, forming an anti-oxidation layer, performing crystallization by using post annealing, removing the anti-oxidation layer, and manufacturing a meta-optical device by using patterning.
Public/Granted literature
- US20180224574A1 META-OPTICAL DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-08-09
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