Invention Grant
- Patent Title: Vertical memory devices
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Application No.: US16516756Application Date: 2019-07-19
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Publication No.: US10943918B2Publication Date: 2021-03-09
- Inventor: Ji-Hoon Choi , Sung-Gil Kim , Jung-Hwan Kim , Chan-Hyoung Kim , Woo-Sung Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A
- Priority: KR10-2018-0152388 20181130
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L27/11582 ; H01L27/1157 ; H01L27/11556 ; H01L27/11524

Abstract:
A vertical memory device may include a channel connecting pattern on a substrate, gate electrodes spaced apart from each other in a first direction on the channel connecting pattern, and a channel extending in the first direction through the gate electrodes and the channel connecting pattern. Each of the electrodes may extend in a second direction substantially parallel to an upper surface of the substrate, and the first direction may be substantially perpendicular to the upper surface of the substrate. An end portion of the channel connecting pattern in a third direction substantially parallel to the upper surface of the substrate and substantially perpendicular to the second direction may have an upper surface higher than an upper surface of other portions of the channel connecting pattern except for a portion thereof adjacent the channel.
Public/Granted literature
- US20200176467A1 VERTICAL MEMORY DEVICES Public/Granted day:2020-06-04
Information query
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