Invention Grant
- Patent Title: Apparatus for wavelength resolved angular resolved cathodoluminescence
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Application No.: US16426629Application Date: 2019-05-30
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Publication No.: US10943764B2Publication Date: 2021-03-09
- Inventor: Michael Bertilson , John Andrew Hunt , David J. Stowe
- Applicant: Gatan, Inc.
- Applicant Address: US CA Pleasanton
- Assignee: Gatan, Inc.
- Current Assignee: Gatan, Inc.
- Current Assignee Address: US CA Pleasanton
- Agency: Snyder, Clark, Lesch & Chung, LLP
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/244 ; H01J37/28

Abstract:
Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.
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