- 专利标题: Amorphous metal thin film nonlinear resistor
-
申请号: US16556157申请日: 2019-08-29
-
公开(公告)号: US10937687B2公开(公告)日: 2021-03-02
- 发明人: Sean William Muir
- 申请人: AMORPHYX, INC.
- 申请人地址: US OR Corvallis
- 专利权人: AMORPHYX, INC.
- 当前专利权人: AMORPHYX, INC.
- 当前专利权人地址: US OR Corvallis
- 代理机构: Seed IP Law Group LLP
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/532 ; G02F1/1343 ; H01L49/02 ; H01L27/12 ; H01L29/49 ; H01L21/3205 ; H01L29/786 ; G02F1/1362
摘要:
Amorphous multi-component metallic films can be used to improve the performance of electronic components such as resistors, diodes, and thin film transistors. Interfacial properties of AMMFs are superior to those of crystalline metal films, and therefore electric fields at the interface of an AMMF and an oxide film are more uniform. An AMMF resistor (AMNR) can be constructed as a three-layer structure including an amorphous metal, a tunneling insulator, and a crystalline metal layer. By modifying the order of the materials, the patterns of the electrodes, and the size and number of overlap areas, the I-V performance characteristics of the AMNR are adjusted. A non-coplanar AMNR has a five-layer structure that includes three metal layers separated by metal oxide tunneling insulator layers, wherein an amorphous metal thin film material is used to fabricate the middle electrodes.
公开/授权文献
- US10971392B2 Amorphous metal thin film nonlinear resistor 公开/授权日:2021-04-06
信息查询
IPC分类: