- 专利标题: Die screening using inline defect information
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申请号: US16439465申请日: 2019-06-12
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公开(公告)号: US10930597B2公开(公告)日: 2021-02-23
- 发明人: Alex Teng Song Lim , Ganesh Meenakshisundaram
- 申请人: KLA-TENCOR CORPORATION
- 申请人地址: US CA Milpitas
- 专利权人: KLA-TENCOR CORPORATION
- 当前专利权人: KLA-TENCOR CORPORATION
- 当前专利权人地址: US CA Milpitas
- 代理机构: Hodgson Russ LLP
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; H01L23/544 ; H01L21/67 ; G06T7/00 ; G01N21/95
摘要:
Embodiments herein include methods, systems, and apparatuses for die screening using inline defect information. Such embodiments may include receiving a plurality of defects, receiving wafersort electrical data for a plurality of dies, classifying each of the defects as a defect-of-interest or nuisance, determining a defect-of-interest confidence for each of the defects-of-interest, determining a die return index for each of the dies containing at least one of the defects-of-interest, determining a die return index cutline, and generating an inking map. Each of the defects may be associated with a die in the plurality of dies. Each of the dies may be tagged as passing a wafersort electrical test or failing the wafersort electrical test. Classifying each of the defects as a defect-of-interest or nuisance may be accomplished using a defect classification model, which may include machine learning. The inking map may be electronically communicated to an inking system.
公开/授权文献
- US20200312778A1 Die Screening Using Inline Defect Information 公开/授权日:2020-10-01
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