Invention Grant
- Patent Title: Apparatus and method of generating a pulsed waveform
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Application No.: US16790086Application Date: 2020-02-13
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Publication No.: US10923321B2Publication Date: 2021-02-16
- Inventor: Leonid Dorf , Evgeny Kamenetskiy , James Rogers , Olivier Luere , Rajinder Dhindsa , Viacheslav Plotnikov
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/311 ; H05H1/24 ; H01L21/683
Abstract:
Embodiments of this disclosure describe a feedback loop that can be used to maintain a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate. The system described herein consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.
Public/Granted literature
- US20200234922A1 APPARATUS AND METHOD OF GENERATING A PULSED WAVEFORM Public/Granted day:2020-07-23
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