Invention Grant
- Patent Title: Horizontal heat choke faceplate design
-
Application No.: US16168462Application Date: 2018-10-23
-
Publication No.: US10907252B2Publication Date: 2021-02-02
- Inventor: Yuxing Zhang , Daniel Hwung , Ashutosh Agarwal , Kaushik Alayavalli , Kalyanjit Ghosh
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01J37/32 ; C23C16/44

Abstract:
Embodiments herein relate to gas distribution apparatuses. In one aspect, the disclosure herein relates to a showerhead including a body having an upper surface and a lower surface. A thermal choke is disposed adjacent a perimeter of the body. The thermal choke includes a plurality of interleaved channels. One or more apertures are disposed between the upper surface and the lower surface of the body.
Public/Granted literature
- US20190119816A1 HORIZONTAL HEAT CHOKE FACEPLATE DESIGN Public/Granted day:2019-04-25
Information query
IPC分类: