- 专利标题： Semiconductor memory device
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申请号： US16702009申请日： 2019-12-03
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公开(公告)号： US10784283B2公开(公告)日： 2020-09-22
- 发明人: Kenji Aoyama
- 申请人： TOSHIBA MEMORY CORPORATION
- 申请人地址： JP Minato-ku
- 专利权人： TOSHIBA MEMORY CORPORATION
- 当前专利权人： TOSHIBA MEMORY CORPORATION
- 当前专利权人地址： JP Minato-ku
- 代理机构： Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权： com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@543599e6
- 主分类号： H01L27/11582
- IPC分类号： H01L27/11582 ; H01L27/11575
摘要：
A semiconductor memory device includes a stacked body, a semiconductor member, a charge storage member, a first member, and second members. The stacked body includes electrode films arranged to be separated from each other along a first direction. A terrace is formed for each electrode film in an end portion of the stacked body in a second direction. The first member spreads along the first direction and the second direction. The first member is provided inside the cell portion. The second members are provided inside the end portion. The electrode film includes two portions separated from each other in a third direction. The two portions are separated in the third direction by the first member and the plurality of second members. An insulator between the electrode films is formed continuously between two sides of the plurality of second members in the third direction.
公开/授权文献
- US20200105787A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日：2020-04-02
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