Invention Grant
- Patent Title: Shared metal gate stack with tunable work function
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Application No.: US16139795Application Date: 2018-09-24
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Publication No.: US10756194B2Publication Date: 2020-08-25
- Inventor: Ruqiang Bao , Siddarth A. Krishnan , Unoh Kwon , Vijay Narayanan
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Kevin Michael Jordan
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/78 ; H01L29/66 ; H01L21/306 ; H01L21/8238 ; H01L21/84 ; H01L27/092 ; H01L27/12

Abstract:
Semiconductor devices include at least one semiconductor fin in each of a first region and a second region. A first work function stack includes a bottom layer and a middle layer formed over the at least one semiconductor fin in the first region. A second work function stack includes a first layer and a second layer formed over the at least one semiconductor fin in the second region. The first layer is continuous with the bottom layer of the first work function stack and the second layer is continuous with the middle layer of the first work function stack, but has a smaller thickness than the middle layer.
Public/Granted literature
- US20190027572A1 SHARED METAL GATE STACK WITH TUNABLE WORK FUNCTION Public/Granted day:2019-01-24
Information query
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