- 专利标题: Integrated circuit package and a method for forming a wafer level chip scale package (WLCSP) with through mold via (TMV)
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申请号: US16131721申请日: 2018-09-14
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公开(公告)号: US10727174B2公开(公告)日: 2020-07-28
- 发明人: Jesus Mennen Belonio, Jr. , Shou Cheng Eric Hu , Ernesto Gutierrez, III , Jerry Li
- 申请人: Dialog Semiconductor (UK) Limited
- 申请人地址: GB London
- 专利权人: Dialog Semiconductor (UK) Limited
- 当前专利权人: Dialog Semiconductor (UK) Limited
- 当前专利权人地址: GB London
- 代理机构: Saile Ackerman LLC
- 代理商 Stephen B. Ackerman; Billy Knowles
- 主分类号: H01L23/495
- IPC分类号: H01L23/495 ; H01L23/498 ; H01L23/31 ; H01L23/544 ; H01L21/48 ; H01L21/56
摘要:
A method for forming a wafer level chip scale package begins with providing an integrated circuit wafer. Applying a dielectric material to the surface of the integrated circuit wafer. A redistribution conductive layer is formed upon the dielectric material to make contact with the input/output contacts of the integrated circuit. A polymer-based film is applied to the surface of the integrated circuit wafer and is subjected to a compression molding process. Alignment marks are placed on the edge of the integrated circuit wafer. A laser ablation process is implemented to prepare through mold via (TMV) in the cured thermoset plastic material. The solder ball or copper pillar input/output connector is placed in the through mold via (TMV). A reflow process is instigated to connect the input/output connector to the redistribution conductive layer's pad surface.
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